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Browsing by Author "Hayashi, Kensuke"

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    Experimental imaging comparison at 0.55 NA of a low-reflectivity low-n mask to a standard Ta-based EUV mask

    Van Look, Lieve  
    ;
    Libeert, Guillaume  
    ;
    Pellens, Nick  
    ;
    Philipsen, Vicky  
    ;
    Kamali, Ali  
    ;
    Pande, Gaurav  
    Proceedings paper
    2026, Optical and EUV Nanolithography XXXIX, 2026-02-22, p.139791I

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