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Browsing by Author "Head, Brian H."

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    Understanding EUV resist dissolution characteristics and its impact to RLS limitations

    Fonseca, Carlos
    ;
    Head, Brian H.
    ;
    Shite, Hideo
    ;
    Nafus, Kathleen  
    ;
    Gronheid, Roel  
    ;
    Winroth, Gustaf
    Proceedings paper
    2011, Extreme Ultraviolet (EUV) Lithography II, 27/02/2011, p.796911

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