Browsing by Author "Heffernan, S."
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Publication Alternative post-etch polymer removal in a single-wafer platform
;Dundas, C. ;Vroom, R. ;Ghekiere, John ;Van Doorne, Patrick ;Rink, I. ;Sharp, I.Heffernan, S.Proceedings paper2003, Ultra Clean Processing of Silicon Surfaces 2002 - UCPSS, 16/09/2002, p.247-251