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Browsing by Author "Heffernan, S."

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    Alternative post-etch polymer removal in a single-wafer platform

    Dundas, C.
    ;
    Vroom, R.
    ;
    Ghekiere, John
    ;
    Van Doorne, Patrick
    ;
    Rink, I.
    ;
    Sharp, I.
    ;
    Heffernan, S.
    Proceedings paper
    2003, Ultra Clean Processing of Silicon Surfaces 2002 - UCPSS, 16/09/2002, p.247-251

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