Repository logo Institutional repository
  • Communities & Collections
  • Browse
  • Site
Search repository
High contrast
  1. Home
  2. Browse by Author

Browsing by Author "Hendriks, M."

Filter results by typing the first few letters
Now showing 1 - 1 of 1
  • Results Per Page
  • Sort Options
  • Loading...
    Thumbnail Image
    Publication

    Cleaning of metal contamination

    Mertens, Paul  
    ;
    Hurd, Trace
    ;
    Gräf, D.
    ;
    Meuris, Marc  
    ;
    Schmidt, Harald
    ;
    Heyns, Marc  
    ;
    Kwakman, L.
    Proceedings paper
    1994, Contamination Control and Defect Reduction in Semiconductor Manufacturing III, 23/05/1994, p.241-252

Follow imec on

VimeoLinkedInFacebook

The repository

  • Contact us
  • Policy
  • About imec
Privacy statement | Cookie settings