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Browsing by Author "Henrion, W."

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    Low-temperature homoepitaxy of silicon by electron cyclotron resonance CVD

    Conrad, E.
    ;
    Elstner, L.
    ;
    Fuhs, W.
    ;
    Henrion, W.
    ;
    Müller, P.
    ;
    Poortmans, Jef  
    ;
    Selle, B.
    ;
    Zeimer, U.
    Proceedings paper
    1997, 14th European Photovoltaic Solar Energy Conference and Exhibition. Proceedings of the International Conference, 30/06/1997, p.1411-1414

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