Browsing by Author "Hermans, J."
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Publication Miniature NIR spectrometer for mobile applications
Proceedings paper2022, Conference on MOEMS and Miniaturized Systems XXI, JAN 22-FEB 24, 2022, p.120130EPublication Recent advancements in 157nm resist performance
;Turnquest, K. ;Graffenberg, V. ;Patel, S. ;Miller, D. ;Dean, K. ;Goethals, MiekeVan Roey, F.Oral presentation2002, 3rd International Symposium on 157nm LithographyPublication UV2Litho: usable vacuum ultra violet lithography
Oral presentation2002, 3th International Symposium on 157nm Lithography