Browsing by Author "Herrero, Analia F."
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Publication Effect of Thickness on the Optical Constants Determination of TiN Thin Films in the EUV/VUV Range
;Abbasirad, Najmeh ;Dutta, Jit ;Herrero, Analia F. ;Kroth, Udo ;Jarnagin, NathanKirschner, HansProceedings paper2026, Metrology, Inspection, and Process Control XL, 2026-02-22, p.139811R