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Browsing by Author "Hetzner, J."

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    Integration of a low permittivity spin-on embedded hardmask for Cu/SiLK resin dual damascene

    Waeterloos, Joost
    ;
    Shaffer, E. O.
    ;
    Stokich, T.
    ;
    Hetzner, J.
    ;
    Price, D.
    ;
    Booms, L.
    ;
    Donaton, R. A.
    Proceedings paper
    2001, Proceedings of the IEEE 2001 International Interconnect Technology Conference, 1/06/2001, p.60-62

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