Browsing by Author "Hilfiker, James N."
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Publication Experimental measurements of diffraction for periodic patterns by 193-nm polarized radiation compared to rigorous EMF simulations
;Bennett, Marylyn Hoy ;Grenville, Andrew ;Hector, Scott ;Palmer, ShaneLeunissen, PeterProceedings paper2005, Optical Microlithography XVIII, 27/02/2005, p.599-610