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Browsing by Author "Hinnen, P."

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    3D features measurement using Yieldstar, an angle resolved polarized scatterometer

    Charley, Anne-Laure  
    ;
    Leray, Philippe  
    ;
    D'have, Koen  
    ;
    Cheng, Shaunee
    ;
    Hinnen, P.
    ;
    Li, Fahong
    Proceedings paper
    2011, Optical Fabrication, Testing and Metrology IV, 5/09/2011, p.8160Q

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