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Browsing by Author "Hinomura, Toru"

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    Publication

    Cu contact technology for sub-100nm contacts

    Demuynck, Steven  
    ;
    Zhao, Chao
    ;
    Hinomura, Toru
    ;
    Tokei, Zsolt  
    ;
    Van den Bosch, Geert  
    ;
    Beyer, Gerald  
    Oral presentation
    2007, Advanced Metallization Conference 2007 - AMC 2007

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