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Browsing by Author "Hirai, M."

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    Integration of a k=2.3 spin-on polymer for the sub-28nm technology node

    Wilson, Chris  
    ;
    Lazzarino, Frederic  
    ;
    Truffert, Vincent  
    ;
    Kirimura, Tomoyuki
    Proceedings paper
    2012, IEEE International Interconnect Technology Conference - IITC, 4/06/2012

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