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Browsing by Author "Ho, Paul"

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    Plasma processing of low-k dielectrics

    Shi, Hualiang
    ;
    Shamiryan, Denis
    ;
    de Marneffe, Jean-Francois  
    ;
    Huang, Huai
    ;
    Ho, Paul
    Book chapter
    2012
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    Preface

    Baklanov, Mikhaïl
    ;
    Ho, Paul
    ;
    Zschech, Ehrenfried
    Book chapter
    2012

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