Browsing by Author "Hodeau, J-L."
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Publication Microstructural characterization of side walls in SBT 3D capacitors
Oral presentation2004, 16th International Symposium on Integrated FerroelectricsPublication Side walls contribution in integrated 3D SBT-based capacitors: electrical and microstructural point of view
Oral presentation2004, E-MRS Spring Meeting Symposium D: Functional Oxides for Advanced Semiconductor Technologies