Browsing by Author "Hooge, Joshua S."
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Publication Extreme-ultraviolet secondary electron blur at the 22-nm half pitch node
Journal article2011, Journal of Micro/Nanolithography MEMS and MOEMS, (10) 3, p.33004Publication Frequency mulitiplication of lamellar phase block copolymers with grapho-epitaxy directed self-assembly sensitivity to prepattern
Journal article2012, Journal of Micro/Nanolithography MEMS and MOEMS, (11) 3, p.31303