Repository logo Institutional repository
  • Communities & Collections
  • Browse
  • Site
Search repository
High contrast
  1. Home
  2. Browse by Author

Browsing by Author "Horsfall, A."

Filter results by typing the first few letters
Now showing 1 - 2 of 2
  • Results Per Page
  • Sort Options
  • Loading...
    Thumbnail Image
    Publication

    Design and application of a sensor to monitor stress in deep submicron copper interconnects

    Wilson, Chris  
    ;
    Croes, Kristof  
    ;
    Tokei, Zsolt  
    ;
    Beyer, Gerald  
    ;
    Horsfall, A.
    ;
    Neill, A.
    Proceedings paper
    2010, Stress-Induced Phenomena in Metallization: 11th International Workshop, 11/04/2010, p.133-138
  • Loading...
    Thumbnail Image
    Publication

    Simulation of the effect of microstructure on the elastic properties of copper interconnects

    Wilson, Chris  
    ;
    Oila, A.
    ;
    Sanderson, L.
    ;
    Bull, S.
    ;
    Raskin, Jean-Pierre
    ;
    Croes, Kristof  
    ;
    Horsfall, A.
    Oral presentation
    2010, 11th International Workshop on Stress-Induced Phenomena in Metallization

Follow imec on

VimeoLinkedInFacebook

The repository

  • Contact us
  • Policy
  • About imec
Privacy statement | Cookie settings