Browsing by Author "Hoshiko, Kenji"
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Publication Comparison of LFLE and LELE manufacturability
Proceedings paper2008, 5th International Symposium on Immersion Lithography Extensions, 22/09/2008Publication Double patterning process with resist freezing technique
;Hoshiko, Kenji ;Shioya, Takeo ;Fujiwara, Koichi ;Yamaguchi, YoshikazuShimokawa, TsutomuProceedings paper2008, 5th International Symposium on Immersion Lithography Extensions, 22/09/2008Publication Full-wafer in-situ fabrication and packaging of microfluidic flow cytometer with photo-patternable adhesive polymers
Journal article2018, Biomedical Microdevices, (20) 2, p.1-10Publication Point-of-use filtration methods to reduce defectivity
Proceedings paper2010, Advances in Resist Materials & Processing Technology XXVII, 21/02/2010, p.763918Publication Roughness and variability in EUV lithography: Who is to blame? (Part 1)
Proceedings paper2013, Extreme Ultraviolet (EUV) Lithography IV, 24/02/2013, p.86792OPublication XAS photoresists electron/quantum yields study with synchrotron light
Proceedings paper2015, Advances in Patterning Materials and Processes XXXII, 22/02/2015, p.942507