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Browsing by Author "Hourd, Andrew C."

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    Advanced optical imaging platform for CD metrology and defect review on 130-nm to 100-nm node reticles: an overview of preliminary results

    Hourd, Andrew C.
    ;
    Grimshaw, Anthony
    ;
    Scheuring, Gerd
    ;
    Gittinger, Christian
    ;
    Brück, Hans-Jürgen
    Proceedings paper
    2002, 18th European Conference on Mask Technology for Integrated Circuits and Microcomponents, 14/01/2002, p.168-174

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