Browsing by Author "Howard, William B."
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Publication Assessment of OPC effectiveness using two-dimensional metrics
Proceedings paper2002, Optical Microlithography XV, 5/03/2002, p.395-406Publication OPC aware mask and wafer metrology
Proceedings paper2002, 18th European Conference on Mask Technology for Integrated Circuits and Microcomponents, 14/01/2002, p.175-181