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Browsing by Author "Hsu, O."

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    The effect of pad structuring on CMP performance

    Devriendt, Katia  
    ;
    Vrancken, Evi  
    ;
    Grillaert, Joost
    ;
    Meuris, Marc  
    ;
    Heylen, Nancy  
    ;
    Fyen, Wim
    Proceedings paper
    1999, Proceedings of the 4th International Chemical Mechanical Planarization for ULSI Multilevel Interconnection Conference - CMP-MIC, 10/02/1999, p.227

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