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Browsing by Author "Hsu, S.D."

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    Experimental verification of a model based decomposition method for double dipole lithography

    Eurlings, M.
    ;
    Hsu, S.D.
    ;
    Hendrickx, Eric  
    ;
    op 't Root, W.
    ;
    Laidig, T.L.
    ;
    Chiou, T.B.
    ;
    Chen, A.
    ;
    Chen, F.
    Proceedings paper
    2004, Optical Microlithography XVII, 22/02/2004, p.1225-1236

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