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Browsing by Author "Hsu, Stephen D."

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    Development of automatic OPC treatment and layout decomposition for double dipole lithography for low K1-imaging

    Chiou, T.-B.
    ;
    Chen, A.
    ;
    Hsu, Stephen D.
    ;
    Eurlings, M.
    ;
    Hendrickx, Eric  
    Proceedings paper
    2005, Advanced Microlithographic Technologies, 8/11/2004, p.21-31

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