Browsing by Author "Huang, Kevin"
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Publication CMP on SiGe materials - linking chemical and physical properties to design low defect selective slurries
Meeting abstract2014, International Conference on Planarization Technology - ICPT, 19/11/2014Publication CMP Slurries for germanium substrates in FEOL applications
Meeting abstract2013, International Conference on Planarization/CMP Technology, 30/10/2013