Browsing by Author "Hughes, Carolyn"
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Publication Assessment of quadrupole mass spectrometry as an in situ HDP-CVD process diagnostic technique
Oral presentation1999, AVS 46th International Symposium; 25-29 October 1999; Seattle, WA, USA.Publication In situ HDP-CVD process diagnostics based on quadrupole mass spectrometry
Proceedings paper1999, Proceedings 1999 IEEE International Symposium on Semiconductor Manufacturing Conference, 11/10/1999, p.209-212Publication In situ HDP-CVD process monitoring based on quadrupole mass spectrometry
Oral presentation2000, Advanced Equipment Control/Advanced Process Control Workshop /Europe