Browsing by Author "Huging, Norbert"
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Publication Strain relaxation of SiGe/Si by He implantation: controlling dislocation sources at He precipitates
;Huging, Norbert ;Luysberg, Martina ;Urban, Knut ;Buca, Dan ;Hollander, BerndMantl, SiegfriedProceedings paper2005, Nanoelectronic Days 2005, 9/02/2005