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Browsing by Author "Ikegami, M."

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    Effects of mechanical stress on polycrystalline-silicon resistors

    Nakabayashi, M.
    ;
    Ohyama, Hidenori
    ;
    Simoen, Eddy  
    ;
    Ikegami, M.
    ;
    Claeys, Cor
    ;
    Kobayashi, K.
    Journal article
    2002, Thin Solid Films, (406) 1_2, p.195-199
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    Influence of boron implantation dose on the mechanical stress in polycrystalline silicon films

    Nakabayashi, M.
    ;
    Ikegami, M.
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    Ohyama, Hidenori
    ;
    Kobauashi, K.
    ;
    Yoneoka, M.
    ;
    Simoen, Eddy  
    Proceedings paper
    2000, 3rd International Conference Materials for Microelectronics, 16/10/2000, p.85-88
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    Mechanical stress of the electrical performance of polycrystalline-silicon resistors

    Nakabayashi, N.
    ;
    Ohyama, Hidenori
    ;
    Simoen, Eddy  
    ;
    Ikegami, M.
    ;
    Claeys, Cor
    ;
    Kobayashi, K.
    Journal article
    2001, Journal of Materials Research, (16) 9, p.2579-2582
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    Reliability of polycrystalline silicon thin film resistors

    Nakabayashi, M.
    ;
    Ohyama, Hidenori
    ;
    Simoen, Eddy  
    ;
    Ikegami, M.
    ;
    Claeys, Cor
    ;
    Kobayashi, K.
    Journal article
    2001, Microelectronics Reliability, (41) 9_10, p.1341-1346
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    Reliability of polycrystalline silicon thin film resistors

    Nakabayashi, M.
    ;
    Ohyama, Hidenori
    ;
    Simoen, Eddy  
    ;
    Ikegami, M.
    ;
    Claeys, C.
    ;
    Kobayashi, K.
    Proceedings paper
    2001, ESREF - Proceedings of the 12th European Symposium Reliability of Electron Devices, Failure Physics and Analysis;, p.1341-1346

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