Browsing by Author "Ikegami, M."
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Publication Effects of mechanical stress on polycrystalline-silicon resistors
Journal article2002, Thin Solid Films, (406) 1_2, p.195-199Publication Influence of boron implantation dose on the mechanical stress in polycrystalline silicon films
Proceedings paper2000, 3rd International Conference Materials for Microelectronics, 16/10/2000, p.85-88Publication Mechanical stress of the electrical performance of polycrystalline-silicon resistors
Journal article2001, Journal of Materials Research, (16) 9, p.2579-2582Publication Reliability of polycrystalline silicon thin film resistors
Journal article2001, Microelectronics Reliability, (41) 9_10, p.1341-1346Publication Reliability of polycrystalline silicon thin film resistors
Proceedings paper2001, ESREF - Proceedings of the 12th European Symposium Reliability of Electron Devices, Failure Physics and Analysis;, p.1341-1346