Repository logo Institutional repository
  • Communities & Collections
  • Browse
  • Site
Search repository
High contrast
  1. Home
  2. Browse by Author

Browsing by Author "Inderhees, Greg"

Filter results by typing the first few letters
Now showing 1 - 1 of 1
  • Results Per Page
  • Sort Options
  • Loading...
    Thumbnail Image
    Publication

    Investigation of the performance of state-of-the-art defect inspection tools within EUV lithography

    Van Den Heuvel, Dieter  
    ;
    Jonckheere, Rik  
    ;
    Cheng, Shaunee
    ;
    Marcuccilli, Gino
    ;
    Cross, Andrew  
    Proceedings paper
    2012, Metrology, Inspection, and Process Control for Microlithography XXVI, 12/02/2012, p.83240L

Follow imec on

VimeoLinkedInFacebook

The repository

  • Contact us
  • Policy
  • About imec
Privacy statement | Cookie settings