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Browsing by Author "Iwata, Tomoya"

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    Low-Temperature Chemical Vapor Deposition of SiCN for Hybrid Bonding

    Onishi, Koki
    ;
    Iwata, Tomoya
    ;
    Habuka, Hitoshi
    ;
    Nagano, Fuya  
    ;
    Inoue, Fumihiro
    Proceedings paper
    2022, International Conference on Electronics Packaging (ICEP), MAY 11-14, 2022, p.59-60

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