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Browsing by Author "Jamal, Muhammad Tahir"

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    Anisotropic biaxial stress measurements in finFET channels through nano-focused raman spectroscopy

    Nuytten, Thomas  
    ;
    Jamal, Muhammad Tahir
    ;
    Hantschel, Thomas  
    ;
    Bogdanowicz, Janusz  
    Oral presentation
    2016, PTW 2016H2

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