Repository logo Institutional repository
  • Communities & Collections
  • Scientific publicationsOpen knowledge
Search repository
High contrast
  1. Home
  2. Browse by Author

Browsing by Author "Janardan, N."

Filter results by typing the first few letters
Now showing 1 - 1 of 1
  • Results per page
  • Sort Options
  • Loading...
    Thumbnail Image
    Publication

    Detection of crystalline defects in Si/SiGe superlattices towards 3D-DRAM applications

    Beggiato, Matteo  
    ;
    Cerbu, Dorin  
    ;
    Loo, Roger  
    ;
    Sun, W.
    ;
    Moussa, Alain  
    ;
    Bast, G.
    ;
    Fukaya, K.
    Proceedings paper
    2024, Conference on Metrology, Inspection, and Process Control XXXVIII, 2024-02-28, p.129551F

Follow imec on

VimeoLinkedInFacebook

The repository

  • Contact us
  • Policy
  • About imec
Privacy statement | Cookie settings