Browsing by Author "Janardan, N."
Now showing 1 - 1 of 1
- Results per page
- Sort Options
Publication Detection of crystalline defects in Si/SiGe superlattices towards 3D-DRAM applications
Proceedings paper2024, Conference on Metrology, Inspection, and Process Control XXXVIII, 2024-02-28, p.129551F