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Browsing by Author "Janssen, Kevin"

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    Low-resistivity epitaxial Ru films on AlN (0001)/Si (111) for interconnect applications

    Soulie, Jean-Philippe  
    ;
    Vohra, Anurag  
    ;
    Debald, Arne
    ;
    Janssen, Kevin  
    ;
    Hahn, Herwig  
    ;
    Fahle, Dirk
    Journal article
    2026, APPLIED PHYSICS LETTERS, (129) 9, p.093304

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