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Browsing by Author "Jarnac, Amelie"

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    Publication

    The small-gap technique: understanding an ion-shading method for plasma-surface interactions study

    de Marneffe, Jean-Francois  
    ;
    Jarnac, Amelie
    ;
    Conard, Thierry  
    ;
    Hendrickx, Dirk  
    ;
    Huffman, Craig
    Meeting abstract
    2010, 3rd International Plasma Etch and Strip for Microelectronics Workshop - PESM, 5/03/2010

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