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Browsing by Author "Jo, Ahjin"

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    Publication

    In-line 3D AFM for critical dimension and sidewall roughness of Si photonic waveguide and correlation with its propagation loss

    Kim, Tae-Gon
    ;
    Verheyen, Peter  
    ;
    De Heyn, Peter  
    ;
    Vandeweyer, Tom  
    ;
    Miller, Andy  
    ;
    Pantouvaki, Marianna  
    Oral presentation
    2017, International Conference on Frontiers of Characterization and Metrology for Nanoelectronics - FCMN

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