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Browsing by Author "Job, Min-Gi"

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    Enabling chemically amplified resists towards tight pitch EUV patterning by directed self-assembly

    Verstraete, Lander  
    ;
    Vallat, Remi  
    ;
    Van Bel, Julie  
    ;
    Job, Min-Gi
    ;
    Bezard, Philippe  
    ;
    Suh, Hyo Seon  
    Proceedings paper
    2025, 2025 Conference on Novel Patterning Technologies, FEB 24-27, 2025

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