Browsing by Author "Jonas, Alain M."
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Publication Filling of 80nm trenches using a novel copper oxide reduction and reflow approach
Proceedings paper2005, Advanced Metallization Conference 2004, 19/10/2004, p.321-326Publication Interface characterization of nanoscale laminate structures on dense dielectric substrates by X-ray reflectivity
Journal article2005-04, Journal of Applied Physics, (97) 8, p.84316