Browsing by Author "Jung, Sung-Hoon"
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Publication New mechanisms for ozone-based ALD growth of high-k dielectrics via nitrogen-oxygen species
Proceedings paper2010, Atomic Layer Deposition Applications 6, 10/10/2010, p.91-99Publication Ozone based atomic layer deposition of hafnium oxide and impact of nitrogen oxide species
Journal article2011-03, Journal of the Electrochemical Society, (158) 5, p.D259-D263