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Browsing by Author "Kadeparambil Varghese, Susan Sherin"

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    Depth-of-focus enhancement in high-numerical aperture EUV lithography by source and mask optimization

    Libeert, Guillaume  
    ;
    Franke, Joern-Holger  
    ;
    Leitao, Sofia
    ;
    Davydova, Natalia
    Journal article
    2026, JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3, (25) 2, p.021208-021208

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