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Browsing by Author "Kalus, C."

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    Hierarchical E-beam proximity correction in mask making

    Hofmann, U.
    ;
    Kalus, C.
    ;
    Rosenbusch, A.
    ;
    Jonckheere, Rik  
    ;
    Hourd, A.
    Proceedings paper
    1996, Electrtron-Beam, X-Ray, EUV, and Ion-Beam Submicrometer Lithographies for Manufacturing VI, 11/03/1996, p.150-158

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