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Browsing by Author "Kaneko, Makoto"

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    Publication

    Curvilinear Data Formats and the Impact on Mask-to-Wafer Fidelity

    Tsai, Yi-Pei
    ;
    Miyaguchi, Kenichi  
    ;
    Shi, Xuelong  
    ;
    Hwang, Soobin  
    ;
    Sherazi, Yasser  
    ;
    Kojima, Yoshinori
    Proceedings paper
    2026, DTCO AND COMPUTATIONAL PATTERNING V, 2026-02-22, p.1398015

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