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Browsing by Author "Kang, Hyun-Gyu"

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    Unraveling strength and mechanical properties of CNT-based EUV pellicle

    Kang, Hyun-Gyu
    ;
    Pollentier, Ivan  
    ;
    Timmermans, Marina  
    ;
    Brems, Steven  
    ;
    Gallagher, Emily  
    Proceedings paper
    2024, Optical and EUV Nanolithography XXXVII, 2024-02-26, p.129530M

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