Browsing by Author "Kawasaki, H."
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Publication Novel volatile film for the protection of organo-silicate glass dielectric materials
;Fujikawa, Makoto ;Yamaguchi, Tatsuya ;Nozawa, S. ;Kikuchi, Y. ;Maekawa, KaoruKawasaki, H.Journal article2019, IEEE Transactions on Semiconductor Manufacturing, (32) 4, p.438-443