Repository logo Institutional repository
  • Communities & Collections
  • Browse
  • Site
Search repository
High contrast
  1. Home
  2. Browse by Author

Browsing by Author "Kazumi, H."

Filter results by typing the first few letters
Now showing 1 - 1 of 1
  • Results Per Page
  • Sort Options
  • Loading...
    Thumbnail Image
    Publication

    Evaluation of roughness transfer from Litho to Etch using CD-SEM

    Tanaka, Motohiro
    ;
    Ishimoto, Toru
    ;
    Kazumi, H.
    ;
    Cheng, Shaunee
    Proceedings paper
    2012, Metrology, Inspection, and Process Control for Microlithography XXVI, 12/02/2012, p.83242R

Follow imec on

VimeoLinkedInFacebook

The repository

  • Contact us
  • Policy
  • About imec
Privacy statement | Cookie settings