Browsing by Author "Keinonen, J."
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Publication Impact of rapid thermal annealing of Ti/TiN bilayers on subsequent chemical vapor deposition of tungsten
Proceedings paper1996, Advanced Metallization for Future ULSI, 8/04/1996, p.365-370Publication Influence of hydrogen on chemical vapor deposition of tungsten on sputter-deposited TiN layers
Journal article1995, Appl. Phys. Lett., 67, p.2998-3000