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Browsing by Author "Kellerman, G."

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    Hafnium aluminates deposited by atomic layer deposition: Structural characterization by X-ray spectroscopy

    Huanca, D.R.
    ;
    Christiano, V.
    ;
    Adelmann, Christoph  
    ;
    Kellerman, G.
    ;
    Verdonck, Patrick  
    Proceedings paper
    2012, Proceedings of the 27th Symposium on Microelectronics Technology and Devices - SBMicro, 30/08/2012, p.383-390

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