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Browsing by Author "Kerkwijk, Bas"

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    New CoSi2 SALICIDE technology for 0.1 µm processes and below

    Wang, Qingfeng
    ;
    Maex, Karen  
    ;
    Kubicek, Stefan  
    ;
    Jonckheere, Rik  
    ;
    Kerkwijk, Bas
    ;
    Verbeeck, Rita  
    Proceedings paper
    1995, 1995 Symposium on VLSI Technology. Digest of Technical Papers; 6-8 June 1995; Kyoto, Japan., p.17-18

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