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Browsing by Author "Khanh, N."

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    Plasma immersion ion implantation for shallow junctions in silicon

    Pinter, Istvan
    ;
    Abdulhadi, A.
    ;
    Makaro, Z.
    ;
    Khanh, N.
    ;
    Adam, M.
    ;
    Barsony, I.
    Oral presentation
    1998, E-MRS 1998 Spring Meeting; 16-19 June 1998; Strasbourg, France.

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