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Browsing by Author "Khazaka, R."

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    Low temperature source / drain epitaxy and functional silicides: essentials for ultimate contact scaling

    Porret, Clément  
    ;
    Everaert, Jean-Luc
    ;
    Schaekers, Marc  
    ;
    Ragnarsson, Lars-Ake  
    ;
    Hikavyy, Andriy  
    Proceedings paper
    2022, International Electron Devices Meeting (IEDM), DEC 03-07, 2022

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