Browsing by Author "Kim, Dongchan"

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Effect of helium plasma on low-k damage during dry resist strip

Urbanowicz, Adam
;
Shamiryan, Denis
;
Kim, Dongchan
;
Baklanov, Mikhaïl
Proceedings paper
2007, 1st International Workshop Plasma Etch and Strip in Microelectronics - PESM, 10/09/2007
Effects of plasma chemistry on low-k film properties

Kim, Dongchan
;
Urbanowicz, Adam
;
Mannaert, Geert
;
Struyf, Herbert
;
Min, K. J.
;
Kang, C. J.
Proceedings paper
2007, 29th International Symposium on Dry Process - DPS, 13/11/2007