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Browsing by Author "Kim, Honggun"

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    Dielectric reliability of 50nm half pitch structures in Aurora® LK

    Demuynck, Steven  
    ;
    Kim, Honggun
    ;
    Huffman, Craig
    ;
    Darnon, Maxime
    ;
    Struyf, Herbert  
    Journal article
    2009, Japanese Journal of Applied Physics, (48) 4, p.04C018

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