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Browsing by Author "Kim, Hoyouny"

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    The influence of barrier slurry selectivity on the design window for copper CMP

    Kim, Hoyouny
    ;
    Vaes, Jan
    ;
    Li, Yunlong  
    ;
    Leunissen, Peter
    Proceedings paper
    2008, International Conference on Planarization/CMP Technology, 10/11/2008

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